JPH0158661U - - Google Patents
Info
- Publication number
- JPH0158661U JPH0158661U JP15535087U JP15535087U JPH0158661U JP H0158661 U JPH0158661 U JP H0158661U JP 15535087 U JP15535087 U JP 15535087U JP 15535087 U JP15535087 U JP 15535087U JP H0158661 U JPH0158661 U JP H0158661U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- coating material
- deposited
- high vacuum
- ion plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000007733 ion plating Methods 0.000 claims 2
- 238000010891 electric arc Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15535087U JPH0158661U (en]) | 1987-10-08 | 1987-10-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15535087U JPH0158661U (en]) | 1987-10-08 | 1987-10-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0158661U true JPH0158661U (en]) | 1989-04-12 |
Family
ID=31432900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15535087U Pending JPH0158661U (en]) | 1987-10-08 | 1987-10-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0158661U (en]) |
-
1987
- 1987-10-08 JP JP15535087U patent/JPH0158661U/ja active Pending